【MiniLab】 Evaporation/Sputtering Dual Chamber System
Two thin-film experimental devices are connected with a load-lock mechanism. Different film deposition devices (sputtering, evaporation, etc.) are seamlessly connected with the load-lock.
Two thin film experimental devices are connected with a load lock mechanism. Different film deposition devices (sputtering - evaporation, etc.) are seamlessly connected with the load lock. With Moorfield's unique load lock system, connections to the process chamber on the left, right, and rear are also possible.
- Company：テルモセラ・ジャパン 本社
- Price：Other
![Sputtering/Dual Chamber System [MiniLab]](https://image.mono.ipros.com/public/product/image/17e/2000781209/IPROS98663158405637428301.jpeg?w=280&h=280)
